Monte Carlo Simulation of Electron Trajectory in Solid for Electron Beam Lithography
- 期刊名称Key Engineering Materials
- 作者Nagao, Akie; Hosaka, Sumio
- 卷第596卷
- 电子ISSN1662-9795
- 文件大小507.04KB
- 发表时间2013-12
- DOI10.4028/www.scientific.net/KEM.596.101
- 页码101-106
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