发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Fabrication of laterally driven bulk titanium devices on titanium-on-glass wafers

Zhang, Yiming; Li, Nannan; Yan, Bo; Feng, Xiaoyang; Hu, Jia; He, Shuwei; Hao, Yilong; Chen, Jing

期刊名称Journal of Micromechanics and Microengineering
作者Zhang, Yiming; Li, Nannan; Yan, Bo; Feng, Xiaoyang; Hu, Jia; He, Shuwei; Hao, Yilong; Chen, Jing
卷第23卷
期第7期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小168.05KB
发表时间2013-07-01
DOI10.1088/0960-1317/23/7/075026