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Spectroscopy diagnostic of dual-frequency capacitively coupled CHF3/Ar plasma

Liu, Wen-Yao; Du, Yong-Quan; Liu, Yong-Xin; Liu, Jia; Zhao, Tian-Liang; Xu, Yong; Li, Xiao-Song; Zhu, Ai-Min; Wang, You-Nian

期刊名称Physics of Plasmas
作者Liu, Wen-Yao; Du, Yong-Quan; Liu, Yong-Xin; Liu, Jia; Zhao, Tian-Liang; Xu, Yong; Li, Xiao-Song; Zhu, Ai-Min; Wang, You-Nian
卷第20卷
期第11期
印刷ISSN1070-664X
文件大小798.72KB
发表时间2013
DOI10.1063/1.4828397