Silicon nitride based plasmonic components for CMOS back-end-of-line integration
- 期刊名称Optics Express
- 作者Zhu, Shiyang; Lo, G. Q.; Kwong, D. L.
- 卷第21卷
- 期第20期
- 电子ISSN1094-4087
- 文件大小3581.83KB
- 发表时间2013-10-07
- DOI10.1364/OE.21.023376
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