Fiber optic phase stepping system for interferometryMercer, Carolyn R.; Beheim, Glenn · ao/30/7/ao-30-7-729.pdf · 1991

Range finding using frequency-modulated laser diodeBeheim, Glenn; Fritsch, Klaus · ao/25/9/ao-25-9-1439.pdf · 1986

Fracture Origins in Miniature Silicon Carbide StructuresQuinn, George D.; Sharpe, William N.; Beheim, Glenn M.; Nemeth, Noel N.; Jadaan, Osama · Key Engineering Materials · 2005

Fiber-optic interferometer using frequency-modulated laser diodesBeheim, Glenn · ao/25/19/ao-25-19-3469.pdf · 1986

Deep RIE Process for Silicon Carbide Power Electronics and MEMSBeheim, Glenn; Salupo, Carl S. · MRS Proceedings · 2000

Modern trends in microstructures and integrated optics for communication, sensing, and actuationBeheim, Glenn · Optical Engineering · 1997

Extreme temperature 6H-SiC JFET integrated circuit technologyPhilip G. Neudeck; Steven L. Garverick; David J. Spry; Liang-Yu Chen; Glenn M. Beheim; Michael J. Krasowski; Mehran Mehregany · 2009

6H-SiC Lateral JFETs for Analog Integrated CircuitsFu, Xiao An; Patil, Amita; Neudeck, Philip G.; Beheim, Glenn M.; Garverick, Steven; Mehregany, Mehran · Materials Science Forum · 2009