Secondary Electrons in EUV Lithography
- 期刊名称Journal of Photopolymer Science and Technology
- 作者Torok, Justin; Re, Ryan Del; Herbol, Henry; Das, Sanjana; Bocharova, Irina; Paolucci, Angela; Ocola, Leonidas E.; Ventrice Jr., Carl; Lifshin, Eric; Denbeaux, Greg; Brainard, Robert L.
- 卷第26卷
- 期第5期
- 印刷ISSN0914-9244
- 电子ISSN1349-6336
- 文件大小362.70KB
- 发表时间2013
- DOI10.2494/photopolymer.26.625
- 页码625-634
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