Prototype MEMS Capacitive Pressure Sensor Design and Manufacturing
- 期刊名称Periodica Polytechnica Electrical Engineering
- 作者Kárpáti, Tamás; Pap, Andrea Edit; Kulinyi, Sándor
- 卷第57卷
- 期第1期
- 印刷ISSN0031-532X
- 电子ISSN1587-3781
- 文件大小4865.30KB
- 发表时间2013
- DOI10.3311/PPee.2066
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