Structure and electrical properties of AlN films prepared on PZT films by the DC reactive magnetron sputtering
- 期刊名称Electronic Materials Letters
- 作者Meng, Xiangqin; Yang, Chengtao; Yang, Jiancang
- 卷第10卷
- 期第1期
- 印刷ISSN1738-8090
- 电子ISSN2093-6788
- 文件大小418.47KB
- 发表时间2014-01
- DOI10.1007/s13391-013-3091-5
- 页码127-130
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