Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
- 期刊名称The European Physical Journal D
- 作者Hofmann, Sven; van Gils, Koen; van der Linden, Steven; Iseni, Sylvain; Bruggeman, Peter
- 卷第68卷
- 期第3期
- 印刷ISSN1434-6060
- 电子ISSN1434-6079
- 文件大小1987.17KB
- 发表时间2014-03
- DOI10.1140/epjd/e2014-40430-3
- 页码56-960
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