A high precision SOI MEMS–CMOS ±4g piezoresistive accelerometer
- 期刊名称Sensors and Actuators A: Physical
- 作者Roy, Anindya Lal; Sarkar, Hrishikesh; Dutta, Anupam; Bhattacharyya, Tarun Kanti
- 卷第210卷
- 印刷ISSN0924-4247
- 文件大小3434.02KB
- 发表时间2014-04
- DOI10.1016/j.sna.2014.01.036
- 页码77-85
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