Effects of growth temperature on performance and stability of zinc oxide thin film transistors fabricated by thermal atomic layer deposition
- 期刊名称Thin Solid Films
- 作者Cho, Sung Woon; Ahn, Cheol Hyoun; Yun, Myeong Gu; Kim, So Hee; Cho, Hyung Koun
- 卷第562卷
- 印刷ISSN0040-6090
- 文件大小1156.50KB
- 发表时间2014-07
- DOI10.1016/j.tsf.2014.04.003
- 页码597-602
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