Structural and phase transformations in C/Si multilayers during annealing
Zhuravel’, I. A.; Bugaev, E. A.; Konotopskii, L. E.; Sevryukova, V. A.; Zubarev, E. N.; Kondratenko, V. V.
- 期刊名称Technical Physics
- 作者Zhuravel’, I. A.; Bugaev, E. A.; Konotopskii, L. E.; Sevryukova, V. A.; Zubarev, E. N.; Kondratenko, V. V.
- 卷第59卷
- 期第5期
- 印刷ISSN1063-7842
- 电子ISSN1090-6525
- 文件大小1888.00KB
- 发表时间2014-05
- DOI10.1134/S1063784214050119
- 页码701-707