A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches
- 期刊名称Applied Physics Letters
- 作者Ryan, C.; Olszewski, Z.; Houlihan, R.; O'Mahony, C.; Duane, R.
- 卷第104卷
- 期第6期
- 印刷ISSN0003-6951
- 电子ISSN1077-3118
- 文件大小974.68KB
- 发表时间2014-02-10
- DOI10.1063/1.4865584
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