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Photopatternable Interfaces for Block Copolymer Lithography

Photopatternable Interfaces for Block Copolymer Lithography

Maher, Michael J.; Bates, Christopher M.; Blachut, Gregory; Carlson, Matthew C.; Self, Jeffrey L.; Janes, Dustin W.; Durand, William J.; Lane, Austin P.; Ellison, Christopher J.; Willson, C. Grant
  • 期刊名称ACS Macro Letters
  • 作者Maher, Michael J.; Bates, Christopher M.; Blachut, Gregory; Carlson, Matthew C.; Self, Jeffrey L.; Janes, Dustin W.; Durand, William J.; Lane, Austin P.; Ellison, Christopher J.; Willson, C. Grant
  • 卷第3卷
  • 期第8期
  • 印刷ISSN2161-1653
  • 电子ISSN2161-1653
  • 文件大小4682.79KB
  • 发表时间2014-08-19
  • DOI10.1021/mz500370r
  • 页码824-828
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