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Oblique Angle Sputtering of Chalcogenide Thin Absorbing Film

Mishra, Pradeep Kumar; Dave, Vikramaditya; Prasad, Jagat Nandan; Choudhary, Ashwini Kumar; Chandra, Ramesh

期刊名称Procedia Technology
作者Mishra, Pradeep Kumar; Dave, Vikramaditya; Prasad, Jagat Nandan; Choudhary, Ashwini Kumar; Chandra, Ramesh
卷第14卷
印刷ISSN2212-0173
文件大小1940.20KB
发表时间2014
DOI10.1016/j.protcy.2014.08.029
页码219-227