Subnanometer Positioning and Drift Compensation With Tunneling Current
Blanvillain, Sylvain; Voda, Alina; Besancon, Gildas; Buche, Gabriel
- 期刊名称IEEE Transactions on Control Systems Technology
- 作者Blanvillain, Sylvain; Voda, Alina; Besancon, Gildas; Buche, Gabriel
- 卷第22卷
- 期第1期
- 印刷ISSN1063-6536
- 电子ISSN1558-0865
- 文件大小1545.73KB
- 发表时间2014-01
- DOI10.1109/TCST.2013.2248364
- 页码180-189