[IEEE 2014 IEEE 21st International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Marina Bay Sands, Singapore (2014.6.30-2014.7.4)] Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Localized FIB delayering on advanced process technologies
Donnet, David; Sidorov, Oleg; Carleson, Pete; Rue, Chad; Alvis, Roger; Madala, Surendra
- 作者Donnet, David; Sidorov, Oleg; Carleson, Pete; Rue, Chad; Alvis, Roger; Madala, Surendra
- 文件大小2897.03KB
- 发表时间2014
- DOI10.1109/IPFA.2014.6898144
- 页码146-149