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[IEEE 2014 IEEE 21st International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Marina Bay Sands, Singapore (2014.6.30-2014.7.4)] Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - ICP-RIE Platinum (Pt) sputter etching

[IEEE 2014 IEEE 21st International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Marina Bay Sands, Singapore (2014.6.30-2014.7.4)] Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - ICP-RIE Platinum (Pt) sputter etching

Mendaros, R. G.; Marcelo, M. T.

作者Mendaros, R. G.; Marcelo, M. T.
文件大小1306.71KB
发表时间2014
DOI10.1109/ipfa.2014.6898195
页码114-117

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