A Comparison of Two Excitation Modes for MEMS Electrothermal Displacement Sensors
- 期刊名称IEEE Electron Device Letters
- 作者Mohammadi, Ali; Moheimani, S. O. Reza; Yuce, Mehmet Rasit
- 卷第35卷
- 期第5期
- 印刷ISSN0741-3106
- 电子ISSN1558-0563
- 文件大小1999.78KB
- 发表时间2014-5
- DOI10.1109/led.2014.2313291
- 页码584-586
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