[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Line centering yield optimization

• 作者Bickford, Jeanne Paulette; Perry, Troy J.; Hedberg, Erik L.; Dezfulian, Kevin K.
• 文件大小281.93KB
• 发表时间2014
• DOI10.1109/asmc.2014.6846952
• 页码345-350