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Characterization of CVD TiN coating at different deposition temperatures and its application in hydrocarbon pyrolysis

Tang, Shiyun; Gao, Shuang; Wang, Sanxing; Wang, Jianli; Zhu, Quan; Chen, Yaoqiang; Li, Xiangyuan

期刊名称Surface and Coatings Technology
作者Tang, Shiyun; Gao, Shuang; Wang, Sanxing; Wang, Jianli; Zhu, Quan; Chen, Yaoqiang; Li, Xiangyuan
卷第258卷
印刷ISSN0257-8972
文件大小1722.39KB
发表时间2014-11
DOI10.1016/j.surfcoat.2014.07.029
页码1060-1067