Electron energy distributions in a magnetized inductively coupled plasma
Song, Sang-Heon; Yang, Yang; Chabert, Pascal; Kushner, Mark J.
- 期刊名称Physics of Plasmas
- 作者Song, Sang-Heon; Yang, Yang; Chabert, Pascal; Kushner, Mark J.
- 卷第21卷
- 期第9期
- 印刷ISSN1070-664X
- 电子ISSN1089-7674
- 文件大小5684.72KB
- 发表时间2014-09
- DOI10.1063/1.4896711