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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - High resolution micro ultrasonic machining (HR-μUSM) for post-fabrication trimming of fused silica 3-D microstructures

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - High resolution micro ultrasonic machining (HR-μUSM) for post-fabrication trimming of fused silica 3-D microstructures

Viswanath, Anupam; Li, Tao; Gianchandani, Yogesh B.
  • 作者Viswanath, Anupam; Li, Tao; Gianchandani, Yogesh B.
  • 文件大小1419.68KB
  • 发表时间2014
  • DOI10.1109/memsys.2014.6765685
  • 页码494-497
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