Observed damage during Argon gas cluster depth profiles of compound semiconductors
- 期刊名称Journal of Applied Physics
- 作者Barlow, Anders J.; Portoles, Jose F.; Cumpson, Peter J.
- 卷第116卷
- 期第5期
- 印刷ISSN0021-8979
- 电子ISSN1089-7550
- 文件大小1095.32KB
- 发表时间2014-08-07
- DOI10.1063/1.4892097
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