Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage

• 期刊名称IEEE Transactions on Control Systems Technology
• 作者Oomen, Tom; van Herpen, Robbert; Quist, Sander; van de Wal, Marc; Bosgra, Okko; Steinbuch, Maarten
• 卷第22卷
• 期第1期
• 印刷ISSN1063-6536
• 电子ISSN1558-0865
• 文件大小3504.07KB
• 发表时间2014-01
• DOI10.1109/tcst.2013.2245668
• 页码102-118