An AFM-based methodology for measuring axial and radial error motions of spindles
Geng, Yanquan; Zhao, Xuesen; Yan, Yongda; Hu, Zhenjiang
- 期刊名称Measurement Science and Technology
- 作者Geng, Yanquan; Zhao, Xuesen; Yan, Yongda; Hu, Zhenjiang
- 卷第25卷
- 期第5期
- 印刷ISSN0957-0233
- 电子ISSN1361-6501
- 文件大小1317.15KB
- 发表时间2014-05-01
- DOI10.1088/0957-0233/25/5/055007