The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy
Huang, Jen Ching; Chang, Ho; You, Yong Chin; Ling, Hui Ti
- 期刊名称Applied Mechanics and Materials
- 作者Huang, Jen Ching; Chang, Ho; You, Yong Chin; Ling, Hui Ti
- 卷第627卷
- 电子ISSN1662-7482
- 文件大小544.04KB
- 发表时间2014-9
- DOI10.4028/www.scientific.net/AMM.627.35
- 页码35-39