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The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy

The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy

Huang, Jen Ching; Chang, Ho; You, Yong Chin; Ling, Hui Ti
  • 期刊名称Applied Mechanics and Materials
  • 作者Huang, Jen Ching; Chang, Ho; You, Yong Chin; Ling, Hui Ti
  • 卷第627卷
  • 电子ISSN1662-7482
  • 文件大小544.04KB
  • 发表时间2014-9
  • DOI10.4028/www.scientific.net/AMM.627.35
  • 页码35-39
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