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Micro/nano-mechanical structure fabricated by transfer printing

Micro/nano-mechanical structure fabricated by transfer printing

Yamashita, Takahiro; Yoshino, Kensaku; Kaneko, Arata

期刊名称International Journal of Precision Engineering and Manufacturing
作者Yamashita, Takahiro; Yoshino, Kensaku; Kaneko, Arata
卷第15卷
期第12期
印刷ISSN2234-7593
电子ISSN2005-4602
文件大小1028.27KB
发表时间2014-12
DOI10.1007/s12541-014-0630-4
页码2581-2587

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