Silicide induced ion beam patterning of Si(001)
- 期刊名称Nanotechnology
- 作者Engler, Martin; Frost, Frank; Müller, Sven; Macko, Sven; Will, Moritz; Feder, René; Spemann, Daniel; Hübner, René; Facsko, Stefan; Michely, Thomas
- 卷第25卷
- 期第11期
- 印刷ISSN0957-4484
- 电子ISSN1361-6528
- 文件大小4666.15KB
- 发表时间2014-03-21
- DOI10.1088/0957-4484/25/11/115303
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