Characterization of SEM speckle pattern marking and imaging distortion by digital image correlation
- 期刊名称Measurement Science and Technology
- 作者Guery, Adrien; Latourte, Félix; Hild, François; Roux, Stéphane
- 卷第25卷
- 期第1期
- 印刷ISSN0957-0233
- 电子ISSN1361-6501
- 文件大小15394.85KB
- 发表时间2014-01-01
- DOI10.1088/0957-0233/25/1/015401