Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method

• 期刊名称Applied Physics Express
• 作者Mizoshiri, Mizue; Mikami, Masashi; Ozaki, Kimihiro; Shikida, Mitsuhiro; Hata, Seiichi
• 卷第7卷
• 期第5期
• 印刷ISSN1882-0778
• 电子ISSN1882-0786
• 文件大小161.30KB
• 发表时间2014-05-01
• DOI10.7567/APEX.7.057101