In-situ Deformation of Silicon Cantilever under Constant Stress as a Function of Temperature
- 期刊名称Journal of Nanotechnology in Engineering and Medicine
- 作者Gan, Ming; Tomar, Vikas; Zhang, Yang
- 印刷ISSN1949-2944
- 文件大小5329.74KB
- 发表时间2014-06-01
- DOI10.1115/1.4027877
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