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Large diameter permanent-magnets-expanded plasma source for spontaneous generation of low-energy ion beama)

Large diameter permanent-magnets-expanded plasma source for spontaneous generation of low-energy ion beama)

Takahashi, Kazunori; Suzuki, Tatsuya; Ando, Akira
  • 期刊名称Review of Scientific Instruments
  • 作者Takahashi, Kazunori; Suzuki, Tatsuya; Ando, Akira
  • 卷第85卷
  • 期第2期
  • 印刷ISSN0034-6748
  • 电子ISSN1089-7623
  • 文件大小454.58KB
  • 发表时间2014-02
  • DOI10.1063/1.4826542
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