Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor
- 期刊名称Sensors
- 作者Ruzziconi, Laura; Ramini, Abdallah; Younis, Mohammad; Lenci, Stefano
- 卷第14卷
- 期第9期
- 电子ISSN1424-8220
- 文件大小819.42KB
- 发表时间2014-09-15
- DOI10.3390/s140917089
- 页码17089-17111
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