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SiC Etching and Sacrificial Oxidation Effects on the Performance of 4H-SiC BJTs

SiC Etching and Sacrificial Oxidation Effects on the Performance of 4H-SiC BJTs

Lanni, Luigia; Malm, Bengt Gunnar; Östling, Mikael; Zetterling, Carl Mikael

期刊名称Materials Science Forum
作者Lanni, Luigia; Malm, Bengt Gunnar; Östling, Mikael; Zetterling, Carl Mikael
电子ISSN1662-9752
文件大小526.09KB
发表时间2014-2
DOI10.4028/www.scientific.net/msf.778-780.1005
页码1005-1008

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