[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Robust design under uncertainties of electro-thermal microactuator
- 作者Safaie, B. Khayatzadeh; Shamshirsaz, M.; Bahrami, M.
- 文件大小294.85KB
- 发表时间2014
- DOI10.1109/dtip.2014.7056698
- 页码1-6
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