Electrochemically assisted PCD tool surface conditioning technique for silicon micromachining
- 期刊名称International Journal of Nanomanufacturing
- 作者Katahira, Kazutoshi; Nakamoto, Kazuo; Yamazaki, Kazuo; Ohmori, Hitoshi
- 卷第10卷
- 印刷ISSN1746-9392
- 电子ISSN1746-9406
- 文件大小1601.94KB
- 发表时间2014
- DOI10.1504/ijnm.2014.059009
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