Simultaneous Actuation and Sensing for Electrostatic Drives in MEMS using Frequency Modulated Capacitive Sensing
- 期刊名称IFAC Proceedings Volumes
- 作者Moore, Steven I.; Moheimani, S. O. Reza
- 卷第47卷
- 期第3期
- 印刷ISSN1474-6670
- 文件大小1035.36KB
- 发表时间2014
- DOI10.3182/20140824-6-za-1003.00080
- 页码6545-6549
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