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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Yield-aware decomposition for LELE double patterning

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Yield-aware decomposition for LELE double patterning

Sturtevant, John L.; Capodieci, Luigi; Kohira, Yukihide; Yokoyama, Yoko; Kodama, Chikaaki; Takahashi, Atsushi; Nojima, Shigeki; Tanaka, Satoshi
  • 作者Sturtevant, John L.; Capodieci, Luigi; Kohira, Yukihide; Yokoyama, Yoko; Kodama, Chikaaki; Takahashi, Atsushi; Nojima, Shigeki; Tanaka, Satoshi
  • 卷第9053卷
  • 印刷ISSN0277-786X
  • 文件大小213.77KB
  • 发表时间2014
  • DOI10.1117/12.2046180
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