SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Localization concept of re-decomposition area to fix hotspots for LELE process
Sturtevant, John L.; Capodieci, Luigi; Yokoyama, Yoko; Sakanushi, Keishi; Kohira, Yukihide; Takahashi, Atsushi; Kodama, Chikaaki; Tanaka, Satoshi; Nojima, Shigeki
- 作者Sturtevant, John L.; Capodieci, Luigi; Yokoyama, Yoko; Sakanushi, Keishi; Kohira, Yukihide; Takahashi, Atsushi; Kodama, Chikaaki; Tanaka, Satoshi; Nojima, Shigeki
- 卷第9053卷
- 印刷ISSN0277-786X
- 文件大小2189.85KB
- 发表时间2014
- DOI10.1117/12.2046263