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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Optical Modelling and Design III - Use of Costas arrays in subpixel metrology

SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Optical Modelling and Design III - Use of Costas arrays in subpixel metrology

Wyrowski, Frank; Sheridan, John T.; Tervo, Jani; Meuret, Youri; Healy, John J.; Sweeney, Gavin; Mas, David; Sheridan, John T.
  • 作者Wyrowski, Frank; Sheridan, John T.; Tervo, Jani; Meuret, Youri; Healy, John J.; Sweeney, Gavin; Mas, David; Sheridan, John T.
  • 卷第9131卷
  • 印刷ISSN0277-786X
  • 文件大小361.02KB
  • 发表时间2014
  • DOI10.1117/12.2051787
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