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Cu/Polyimide Multilayer Interconnections Fabricated by Nanoimprint at Every Lithography Process

Suzuki, Kenta; Youn, Sung-Won; Park, Sang-Cheon; Hiroshima, Hiroshi; Takagi, Hideki

期刊名称Journal of Photopolymer Science and Technology
作者Suzuki, Kenta; Youn, Sung-Won; Park, Sang-Cheon; Hiroshima, Hiroshi; Takagi, Hideki
卷第27卷
期第1期
印刷ISSN0914-9244
电子ISSN1349-6336
文件大小628.11KB
发表时间2014
DOI10.2494/photopolymer.27.73
页码73-80