Adhesion Characteristics Evaluation Method for Ultra Thin Films by Nanoindentation
- 作者UMEMURA, Shigeru; FURUTA, Ryusuke; MATSUMOTO, Hiroshi; KAMATA, Tomoyuki; NIWA, Osamu; HIRONO, Shigeru
- 卷第65卷
- 期第12期
- 印刷ISSN0915-1869
- 电子ISSN1884-3409
- 文件大小953.31KB
- 发表时间2014
- DOI10.4139/sfj.65.628
- 页码628-630
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