Multirate PWM Control of Precision Stage for Ultrahigh-Speed Nanoscale Positioning
- 期刊名称IEEJ Journal of Industry Applications
- 作者Fujimoto, Hiroshi; Sakata, Koichi
- 卷第3卷
- 期第3期
- 印刷ISSN2187-1094
- 电子ISSN2187-1108
- 文件大小1950.99KB
- 发表时间2014
- DOI10.1541/ieejjia.3.270
- 页码270-276
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