Strategies to integrate porous layers in microfluidic devices
Hereijgers, Jonas; Desmet, Gert; Breugelmans, Tom; De Malsche, Wim
- 期刊名称Microelectronic Engineering
- 作者Hereijgers, Jonas; Desmet, Gert; Breugelmans, Tom; De Malsche, Wim
- 卷第132卷
- 印刷ISSN0167-9317
- 文件大小3091.79KB
- 发表时间2015-01
- DOI10.1016/j.mee.2014.09.019
- 页码1-13