CMOS–MEMS resonators: From devices to applications
- 期刊名称Microelectronic Engineering
- 作者Uranga, A.; Verd, J.; Barniol, N.
- 卷第132卷
- 印刷ISSN0167-9317
- 文件大小3103.02KB
- 发表时间2015-01
- DOI10.1016/j.mee.2014.08.015
- 页码58-73
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