Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process

• 期刊名称Analog Integrated Circuits and Signal Processing
• 作者Grixti, Ryan; Grech, Ivan; Casha, Owen; Darmanin, Jean Marie; Gatt, Edward; Micallef, Joseph
• 卷第82卷
• 期第3期
• 印刷ISSN0925-1030
• 电子ISSN1573-1979
• 文件大小1701.42KB
• 发表时间2015-3
• DOI10.1007/s10470-014-0484-9
• 页码599-610