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Electrical and optical properties of ZnO:Al films with different hydrogen contents in sputtering gas

Qu, Fei; Zhang, Teng; Gu, Hong-Wei; Qiu, Qing-Quan; Ding, Fa-Zhu; Peng, Xing-Yu; Wang, Hong-Yan

期刊名称Rare Metals
作者Qu, Fei; Zhang, Teng; Gu, Hong-Wei; Qiu, Qing-Quan; Ding, Fa-Zhu; Peng, Xing-Yu; Wang, Hong-Yan
卷第34卷
期第3期
印刷ISSN1001-0521
电子ISSN1867-7185
文件大小787.73KB
发表时间2015-3
DOI10.1007/s12598-014-0435-8
页码173-177