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Ge surface passivation by GeO2fabricated by N2O plasma oxidation

Lin, Meng; An, Xia; Li, Ming; Yun, QuanXin; Li, Min; Li, ZhiQiang; Liu, PengQiang; Zhang, Xing; Huang, Ru

期刊名称Science China Information Sciences
作者Lin, Meng; An, Xia; Li, Ming; Yun, QuanXin; Li, Min; Li, ZhiQiang; Liu, PengQiang; Zhang, Xing; Huang, Ru
卷第58卷
期第4期
印刷ISSN1674-733X
电子ISSN1869-1919
文件大小581.20KB
发表时间2015-4
DOI10.1007/s11432-014-5180-y
页码1-5