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Effects of sputtering atmosphere on the properties of c-plane ScAlN thin films prepared on sapphire substrate

Effects of sputtering atmosphere on the properties of c-plane ScAlN thin films prepared on sapphire substrate

Zhang, Yao; Zhu, Weixin; Zhou, Dong; Yang, Yixi; Yang, Chengtao

期刊名称Journal of Materials Science: Materials in Electronics
作者Zhang, Yao; Zhu, Weixin; Zhou, Dong; Yang, Yixi; Yang, Chengtao
卷第26卷
期第1期
印刷ISSN0957-4522
电子ISSN1573-482X
文件大小3896.00KB
发表时间2015-1
DOI10.1007/s10854-014-2423-z
页码472-478

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